Secondary fluorescence correction for quantitative X-ray microanalysis integrated in a user-friendly framework

July 30, 2020

Yu Yuan (1), Hendrix Demers (2), Samantha Rudinsky (3), Nicolas Brodusch (1), Mathieu Gendron (4), Eric Yen (4), Sabrina Clusiau (4), Nicolas Piché (4), Raynald Gauvin (1)
Microscopy and Microanalysis, 26, Supplement S2, July 2020: 956-969. DOI: 10.1017/S1431927620014865


In scanning electron microscopy (SEM) or electron probe microanalysis (EPMA), the Monte Carlo method is widely used for modeling electron and X-ray transport within specimens. For an accurate simulation, the calculation of secondary fluorescence is necessary, especially for specimens with complex structures.

How Our Software Was Used

Dragonfly was used to perform image segmentation, visualization, and analysis.

Author Affiliation

(1) McGill University, Montreal, Quebec, Canada.
(2) Centre d’excellence en électrification des transports et stockage d’énergie, Hydro-Québec, Varennes, Quebec, Canada.
(3) Steam Instruments, Montreal, Quebec, Canada.
(4) Object Research Systems, Montreal, Quebec, Canada.